Preparation of TiAlN/ZrN and TiCrN/ZrN multilayers by RF magnetron sputtering

Jong-KookLEE,Gwon-SeungYANG

Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (04) : 795-799.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (04) : 795-799.
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Preparation of TiAlN/ZrN and TiCrN/ZrN multilayers by RF magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2009, 19(04): 795-799

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