Effect of process parameters on electrical, optical properties of IZO films produced by inclination opposite target type DC magnetron sputtering

Do-HoonSHIN,Yun-HaeKIM,Joong-WonHAN,Kyung-ManMOON,Ri-IchiMURAKAMI

Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (04) : 997-1000.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (04) : 997-1000.
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Effect of process parameters on electrical, optical properties of IZO films produced by inclination opposite target type DC magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2009, 19(04): 997-1000

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