Effects of nitrogen content on structure and electrical properties of nitrogen-doped fluorinated diamond-like carbon films

XIAOJian-rong(肖剑荣),LIXin-hai(李新海),WANGZhi-xing(王志兴)

Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (06) : 1551-1555.

Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (06) : 1551-1555.
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Effects of nitrogen content on structure and electrical properties of nitrogen-doped fluorinated diamond-like carbon films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2009, 19(06): 1551-1555

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