Review of micromachining of ceramics by etching

H.T.TING,K.A.ABOU-EL-HOSSEIN,H.B.CHUA

Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (Special 1) : 1-16.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (Special 1) : 1-16.
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Review of micromachining of ceramics by etching

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2009, 19(Special 1): 1-16

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