Sub-micron-structure machining on silicon by femtosecond laser

Hung-YinTSAI,Shao-WeiLUO,Chih-WeiWU,Shing-HoaWANG

Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (Special 1) : 171-177.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (Special 1) : 171-177.
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Sub-micron-structure machining on silicon by femtosecond laser

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2009, 19(Special 1): 171-177

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