Grid and substrate bias effects on mechanical properties of diamond films prepared by HFCVD

XUFeng(徐锋),ZUODun-wen(左敦稳),LUWen-zhuang(卢文壮),ZHUYong-wei(朱永伟),WANGMin(王珉)

Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (Special 3) : 722-726.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2009, Vol. 19 ›› Issue (Special 3) : 722-726.
Ceramic and Cermets Materials

Grid and substrate bias effects on mechanical properties of diamond films prepared by HFCVD

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2009, 19(Special 3): 722-726

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