Thermal performance of sputtered Cu films containing insoluble Zr and Cr for advanced barrierless Cu metallization

WANG Xin-jian(王新建), DONG Xian-ping(董显平), JIANG Chuan-hai(姜传海)

Transactions of Nonferrous Metals Society of China ›› 2010, Vol. 20 ›› Issue (02) : 217-222.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2010, Vol. 20 ›› Issue (02) : 217-222.
Functional Materials

Thermal performance of sputtered Cu films containing insoluble Zr and Cr for advanced barrierless Cu metallization

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2010, 20(02): 217-222

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