Fabrication of curved micro structures on photoresist layer

Jae Sung YOON, Tae-Jin JE, Doo-Sun CHOI, Sung Hwan CHANG, Kyung-Hyun WHANG

Transactions of Nonferrous Metals Society of China ›› 2011, Vol. 21 ›› Issue (Special 1) : 100-103.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2011, Vol. 21 ›› Issue (Special 1) : 100-103.
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Fabrication of curved micro structures on photoresist layer

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 21(Special 1): 100-103

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