Structure characteristic and its evolution of Cu-W films prepared by dual-target magnetron sputtering deposition

ZHOULing-ping,WANGMing-pu,PENGKun,ZHUJia-jun,FUZhen,LIZhou

Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (11) : 2700-2706.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (11) : 2700-2706.
Functional Materials

Structure characteristic and its evolution of Cu-W films prepared by dual-target magnetron sputtering deposition

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 22(11): 2700-2706

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