Evaluation on residual stresses of silicon-doped CVD diamond films using X-ray diffraction and Raman spectroscopy

CHEN Su-lin, SHEN Bin, ZHANG Jian-guo, WANG Liang, SUN Fang-hong

Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (12) : 3021-3026.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (12) : 3021-3026.
Functional Materials

Evaluation on residual stresses of silicon-doped CVD diamond films using X-ray diffraction and Raman spectroscopy

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 22(12): 3021-3026

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