Influence of Ti target current on microstructure and properties of Ti-doped graphite-like carbon films

WANGYong-xin,WANGLi-ping,XUEQun-ji

Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (6) : 1372-1380.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (6) : 1372-1380.
功能材料-Functional Materials

Influence of Ti target current on microstructure and properties of Ti-doped graphite-like carbon films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 22(6): 1372-1380

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