Ti-containing hydrogenated carbon films fabricated by high-power plasma magnetron sputtering
YANGPeng,SUNGChia-chi,FUHYiin-kuen,CHUChun-lin,LOChih-hung
Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (6) : 1381-1386.
Ti-containing hydrogenated carbon films fabricated by high-power plasma magnetron sputtering
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