Ti-containing hydrogenated carbon films fabricated by high-power plasma magnetron sputtering

YANGPeng,SUNGChia-chi,FUHYiin-kuen,CHUChun-lin,LOChih-hung

Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (6) : 1381-1386.

Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (6) : 1381-1386.
功能材料-Functional Materials

Ti-containing hydrogenated carbon films fabricated by high-power plasma magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 22(6): 1381-1386

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