Influence of substrate bias on microstructure and morphology of ZrN thin films deposited by arc ion plating

ZHANGMin,HUXiao-gang,YANGXiao-xu,XUFei-fei,KIMKwang-Ho,SHAOZhi-gang

Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (Special 1) : 115-119.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (Special 1) : 115-119.
功能材料-Functional Materials

Influence of substrate bias on microstructure and morphology of ZrN thin films deposited by arc ion plating

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 22(Special 1): 115-119

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