Effect of substrate bias on microstructure and tribological performance of GLC films using hybrid HIPIMS technique

ZHANGXue-qian,KEPei-ling,WANGAi-ying,HUANGMei-dong,KwangHoKIM

Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (Special 3) : 740-744.

Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (Special 3) : 740-744.
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Effect of substrate bias on microstructure and tribological performance of GLC films using hybrid HIPIMS technique

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2012, 22(Special 3): 740-744

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