Effect of substrate bias on microstructure and tribological performance of GLC films using hybrid HIPIMS technique
ZHANGXue-qian,KEPei-ling,WANGAi-ying,HUANGMei-dong,KwangHoKIM
Transactions of Nonferrous Metals Society of China ›› 2012, Vol. 22 ›› Issue (Special 3) : 740-744.
Effect of substrate bias on microstructure and tribological performance of GLC films using hybrid HIPIMS technique
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