Temperature coefficient of resistivity of TiAlN films deposited by radio frequency magnetron sputtering

Min-Ho PARK, Sang-Ho KIM

Transactions of Nonferrous Metals Society of China ›› 2013, Vol. 23 ›› Issue (2) : 433-438.

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The Nonferrous Metals Society of China
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Transactions of Nonferrous Metals Society of China ›› 2013, Vol. 23 ›› Issue (2) : 433-438.
Functional Materials

Temperature coefficient of resistivity of TiAlN films deposited by radio frequency magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2013, 23(2): 433-438

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