Microstructures of TiN, TiAlN and TiAlVN coatings on AISI M2 steel deposited by magnetron reactive sputtering

Cui-fengWANG,Shih-fuOU,Shi-yungCHIOU

Transactions of Nonferrous Metals Society of China ›› 2014, Vol. 24 ›› Issue (8) : 2559-2565.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2014, Vol. 24 ›› Issue (8) : 2559-2565.
Functional Materials

Microstructures of TiN, TiAlN and TiAlVN coatings on AISI M2 steel deposited by magnetron reactive sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 24(8): 2559-2565

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