Effects of sputtering pressure on nanostructure and nanomechanical properties of AlN films prepared by RF reactive sputtering

Qiu-pingWEI,Xiong-weiZHANG,Dan-yingLIU,JieLI,Ke-chaoZHOU,DouZHANG,Zhi-mingYU,

Transactions of Nonferrous Metals Society of China ›› 2014, Vol. 24 ›› Issue (9) : 2845-2855.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2014, Vol. 24 ›› Issue (9) : 2845-2855.
Functional Materials

Effects of sputtering pressure on nanostructure and nanomechanical properties of AlN films prepared by RF reactive sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 24(9): 2845-2855

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