Effect of bias voltage on compositional, mechanical and corrosion property of ZrNbAlN multilayer films by unbalanced magnetron sputtering

Yong-jingSHI,Fu-shengPAN,Ming-dongBAO,Hu-chengPAN,MuhammadRASHAD

Transactions of Nonferrous Metals Society of China ›› 2014, Vol. 24 ›› Issue (9) : 2856-2863.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2014, Vol. 24 ›› Issue (9) : 2856-2863.
Functional Materials

Effect of bias voltage on compositional, mechanical and corrosion property of ZrNbAlN multilayer films by unbalanced magnetron sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 24(9): 2856-2863

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