Effect of bias voltage on microstructure and nanomechanical properties of Ti films

Ying-longLIU,FangLIU,QianWU,Ai-yingCHEN,XiangLI,DengPAN

Transactions of Nonferrous Metals Society of China ›› 2014, Vol. 24 ›› Issue (9) : 2870-2876.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2014, Vol. 24 ›› Issue (9) : 2870-2876.
Functional Materials

Effect of bias voltage on microstructure and nanomechanical properties of Ti films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 24(9): 2870-2876

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