Structural and optoelectronic properties of AZO thin films prepared by RF magnetron sputtering at room temperature

Yi-huaSUN,Hai-linWANG,JianCHEN,LiangFANG,LeiWANG

Transactions of Nonferrous Metals Society of China ›› 2016, Vol. 26 ›› Issue (6) : 1655-1662.

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The Nonferrous Metals Society of China
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Transactions of Nonferrous Metals Society of China ›› 2016, Vol. 26 ›› Issue (6) : 1655-1662.
Functional Materials

Structural and optoelectronic properties of AZO thin films prepared by RF magnetron sputtering at room temperature

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 26(6): 1655-1662

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