Effect of substrate rotation speed on structure and properties of Al-doped ZnO thin films prepared by rf-sputtering

E. A. MARTíN-TOVAR, L. G. DAZA, A. J. R. LóPEZ-ARREGUíN, A. IRIBARREN, R. CASTRO-RODRIGUEZ

Transactions of Nonferrous Metals Society of China ›› 2017, Vol. 27 ›› Issue (9) : 2055-2062.

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Transactions of Nonferrous Metals Society of China ›› 2017, Vol. 27 ›› Issue (9) : 2055-2062.
Functional Materials

Effect of substrate rotation speed on structure and properties of Al-doped ZnO thin films prepared by rf-sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 27(9): 2055-2062

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