Microstructure and residual stress of TiN films deposited at low temperature by arc ion plating

Hai-juanMEI,Sheng-shengZHAO,WeiCHEN,Qi-minWANG,Hai-fengLIANG

Transactions of Nonferrous Metals Society of China ›› 2018, Vol. 28 ›› Issue (7) : 1368-1376.

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Transactions of Nonferrous Metals Society of China ›› 2018, Vol. 28 ›› Issue (7) : 1368-1376.
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Microstructure and residual stress of TiN films deposited at low temperature by arc ion plating

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 28(7): 1368-1376

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