Tuning optical properties of ITO films grown by rf sputtering: Effects of oblique angle deposition and thermal annealing

L.G.DAZA,M.ACOSTA,R.CASTRO-RODRíGUEZ,A.IRIBARREN

Transactions of Nonferrous Metals Society of China ›› 2019, Vol. 29 ›› Issue (12) : 2566-2576.

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Transactions of Nonferrous Metals Society of China ›› 2019, Vol. 29 ›› Issue (12) : 2566-2576.
Materials Science and Engineering

Tuning optical properties of ITO films grown by rf sputtering: Effects of oblique angle deposition and thermal annealing

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 29(12): 2566-2576

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