Effect of frequency and pulse-on time of high power impulse magnetron sputtering on deposition rate and morphology of titanium nitride using response surface methodology

Saeed GHASEMI, Ali Reza FARHADIZADEH, Hamid GHOMI

Transactions of Nonferrous Metals Society of China ›› 2019, Vol. 29 ›› Issue (12) : 2577-2590.

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Transactions of Nonferrous Metals Society of China ›› 2019, Vol. 29 ›› Issue (12) : 2577-2590.
Materials Science and Engineering

Effect of frequency and pulse-on time of high power impulse magnetron sputtering on deposition rate and morphology of titanium nitride using response surface methodology

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 29(12): 2577-2590

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