MATERIALS SCIENCE AND ENGINEERING

Effects of modulation layer thickness on microstructures and mechanical behavior of VN/TiN−Ni nano-multilayered films

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  • a Center for Research on the Preparation and Properties of New Functional Materials, School of Physics and Electronic Engineering, Hanjiang Normal University, Shiyan 442000, China;

    b School of Materials and Chemistry, University of Shanghai for Science and Technology, Shanghai 200093, China;

    c Shanghai Tool Factory Company Limited, Shanghai 200093, China;

    d Department of Materials Science and Engineering, The University of Tennessee, Knoxville TN 37996, USA

Online published: 2026-04-02

Abstract

The dependence of interface structure and mechanical properties on the modulation layer thickness of VN/TiN−Ni nano-multilayered films deposited on Si substrates using a reactive magnetron sputtering technique was systematically investigated. The films were characterized using X-ray diffraction, scanning electron microscopy, X-ray photoelectron spectroscopy, transmission electron microscopy, and nanoindentation. The results show that the TiN−Ni layer grows epitaxially on the VN layer, forming a coherent interface between the two sublayers. When the deposition time ratio of the two sublayers (TTiN−NiTVN) is 10꞉12, the films exhibit remarkable mechanical properties, with hardness, elastic modulus, and fracture toughness values of 25.9 GPa, 317 GPa, and 1.88 MPa·m1/2, respectively. Meanwhile, fracture toughness is improved by approximately 50% compared to the VN monolithic film. This enhancement is attributed to the coherent interface between the sublayers and the phase separation in the TiN−Ni layer.

Cite this article

Wen-jie CHENG, Ping LIU, Xin-fa ZHU, Yi MENG, Hong-mei LU, Peter K. LIAW, Wei LI . Effects of modulation layer thickness on microstructures and mechanical behavior of VN/TiN−Ni nano-multilayered films[J]. Transactions of Nonferrous Metals Society of China, 2026 , 36(2) : 586 -599 . DOI: 10.1016/S1003-6326(25)66983-4

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