The Nonferrous Metals Society of China
Influence of substrate bias on microstructure and morphology of ZrN thin films deposited by arc ion plating
ZHANGMin,HUXiao-gang,YANGXiao-xu,XUFei-fei,KIMKwang-Ho,SHAOZhi-gang
Transactions of Nonferrous Metals Society of China . 2012, (Special 1): 115 -119 . 

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