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The Nonferrous Metals Society of China
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TNMSC at ELSEVIER
Electrochemical characteristic of chemical-mechanical polishing of copper with oxide passive film
HEHan-wei(何捍卫),HUYue-hua(胡岳华),ZHOUKe-chao(周科朝),XIONGXiang(熊翔),HUANGBai-yun(黄伯云)
Transactions of Nonferrous Metals Society of China . 2003, (
04
): 977 -981 .